Air Pollution Prevention

The air pollution prevention capabilities of VisEra meets the regulations in the “Air Pollution Control and Emissions Standards for the Semiconductor Industry” and “Standards for Air Pollutant Emission from Stationary Pollution Sources”. To ensure stable 24-hour year-round operations pollution prevention equipment, all air pollution prevention equipment must be equipped with at least one backup system (N+1 design) and a DC backup system to prevent power interruption. The design is implemented to ensure zero failure of the prevention equipment and ensure stable and continuous pollution monitoring. In addition, VisEra also set up automatic monitoring facilities to monitor the effectiveness of waste gas treatment in all systems. Related information is reported to the on-duty office of plant operations and the Occupational Safety and Environmental Protection Emergency Response Center to operate the independent dual-track monitoring system and ensure that the stack emissions meet regulatory requirements.

VisEra’s air pollutants can be divided into acidic and alkaline gases and volatile organic gases. We adopted “separation of emissions at the source” and “best available technology for multi-section processing system” as our strategy for air pollution prevention so that the pollutant levels meet (or are superior to) government environmental protection regulations. The first stage for separation of emissions at the source is implemented for acid and alkaline process waste gas that are corrosive, flammable, greenhouse gas, or perfluorinated compounds as determined based on process characteristics. We added high-performance air treatment local scrubbers to effectively treat process emissions. Finally, the inorganic acid and alkaline gases are directed to the central scrubber for the second-stage of water neutralization process in the terminal pollution prevention equipment. For volatile organic gases, we determine whether to install treatment equipment such as local condensers based on their boiling points. We then direct the process emissions to the zeolite rotor concentrator system for treatment. With separation at the source and two-stage treatment, we enhance the efficiency of air emission treatment across the board. As a result, VisEra’s air emissions have consistently met (exceeded) the standards for emissions set by the EPA. With our early warning mechanisms and immediate response to issues, there were no anomalies involving pollutant emissions that were reported to the competent authority in 2022.

Total air pollutant emissions